The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 18, 1986
Filed:
Jan. 22, 1985
Applicant:
Inventors:
Jurgen Frosien, Ottobrunn, DE;
Burkhard Lischke, Munich, DE;
Assignee:
Siemens Aktiengesellschaft, Berlin & Munich, DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R / ;
U.S. Cl.
CPC ...
324 / ; 3241 / ;
Abstract
A sampling method for potential determination in electron beam mensuration, in which a progression of a periodic signal is to be identified at a measuring point, makes it possible to clearly increase the speed in electron beam potential measurement. The progression of the periodic signal is sampled by the pulsed electron beam repeatedly during a period of the progression of the periodic signal, namely at the specified times t.sub.1, t.sub.2. . . t.sub.n.