The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 09, 1986
Filed:
Apr. 03, 1984
Akikazu Tanimoto, Yokohama, JP;
Kazunori Imamura, Tokyo, JP;
Nippon Kogaku K. K., Tokyo, JP;
Abstract
An inspecting apparatus for precisely detecting foreign substances or scars present on a translucent planar article such as a photomask at a high speed with a laser beam entering from face of the article, comprises first photoelectric means for receiving the scattered light generated in a space on a face of the photomask, second photoelectric means for receiving the scattered light generated in a space on the other face of the photomask, comparator means for comparing the photoelectrically converted signals from the first and second photoelectric means to identify one of predetermined plural magnitude relationships to which the magnitudes of the signals belong, and inspecting means for generating, in response to the detection output signal of the comparator means, a detection signal allowing to identify the approximate difference in the shape of the foreign substance, for example either a tall foreign substance or a short one.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile