The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 11, 1986
Filed:
Apr. 04, 1983
Applicant:
Inventor:
Leslie J Palkuti, Sunnyvale, CA (US);
Assignee:
Advanced Research and Applications Corporation, Sunnyvale, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R / ; G01R / ;
U.S. Cl.
CPC ...
3241 / ; 3241 / ;
Abstract
A test apparatus for electron devices, such as integrated circuits, at the wafer stage of fabrication, wherein a beam of ionizing radiation is directed through an electrical probe card and onto the wafer under test. The probe card and the radiation beam share a common port through which a selected device or group of devices is exposed, but other devices on the wafer are not similarly exposed. A microscope, supported on a frame, is interchangeable with the radiation beam source, sharing the common port, so that a tested device may be observed.