The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 14, 1984
Filed:
Aug. 11, 1983
Stephen M Bobbio, Hamburg, NY (US);
Marie C Flanigan, Lockport, NY (US);
Kenneth M Thrun, Cheektowaga, NY (US);
Allied Corporation, Morris Township, Morris County, NJ (US);
Abstract
A gaseous mixture of SF.sub.6 and a nitriding component such as NH.sub.3 is disclosed as an effective selective SiO.sub.2 etchant for use in either the plasma or reactive ion etch process. By adding NH.sub.3 to the SF.sub.6, which is a known effective plasma etchant for silicon or poly-silicon, the silicon etch rate decreases while the oxide rate is effectively constant. At about 14% nitriding gas component, the rates are equivalent and for higher nitriding gas fractions, the silicon dioxide rate dominates. The optional addition of an inert diluent gas did not substantially change these results. The addition of hydrogen to the gaseous SF.sub.6 /nitriding component mixture retards the etch rate on silicon still further and may increase the selectivity.