The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 15, 1983
Filed:
May. 22, 1978
Applicant:
Inventor:
Vincent J Coates, Cupertino, CA (US);
Assignee:
Nanometrics Incorporated, Sunnyvale, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B / ;
U.S. Cl.
CPC ...
356384 ; 250234 ; 356387 ;
Abstract
Very narrow lines, such as integrated circuit conductors, are accurately measured with consistent accuracy using a microscope that projects the image of the narrow object against a slit behind which is a photomultiplier tube. The photomultiplier tube and slit are moved in very small steps under the control of a microcomputer that measures the photomultiplier tube amplitude at each step, eliminates background error due to illumination irregularities, etc., and provides a printout of the line width in micrometers or microinches.