The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 21, 1982

Filed:

Jun. 22, 1979
Applicant:
Inventors:

William S Johnson, Scotsdale, AZ (US);

Ronald W Knepper, LaGrangeville, NY (US);

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
357 23 ; 357 20 ; 357 42 ; 357 89 ; 357 91 ;
Abstract

A method for fabricating an N-channel silicon MOS field effect transistor on a P-type substrate. The structure retains the natural isolation between devices and the consequent higher device density in an integrated circuit structure than conventional double diffused MOS field effect transistor devices. The device is fabricated by using ion implantation to create an N-type surface layer in the channel and then overcompensating this layer to create a P-type region near the source by ion implanting P-type ions into the source junction region. The source to substrate capacitance is considerably less than that of conventional double diffused MOS devices which provides an improved circuit performance.


Find Patent Forward Citations

Loading…