The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 09, 1982
Filed:
Jan. 23, 1981
Applicant:
Inventors:
David E Moss, Kokomo, IN (US);
Karl E Stone, Kokomo, IN (US);
Charles A Bright, Jr, Kokomo, IN (US);
Randy A Rusch, Kokomo, IN (US);
Assignee:
General Motors Corporation, Detroit, MI (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C / ;
U.S. Cl.
CPC ...
427 38 ; 156657 ; 338-2 ; 338-4 ; 357 26 ; 427 39 ;
Abstract
A method of making a strain gauge in a fragile web wherein the improvement resides in making the web after the gauge is substantially completely formed. This reverse sequence is made possible by a unique combination of plasma deposited silicon oxide and plasma deposited silicon nitride on top of the completed device to protect it from attack during silicon substrate etching to form the diaphragm.
Moss, David. (1982). Method of making strain sensor in fragile web (U.S. Patent No. 4318936). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/4318936
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile