The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 07, 1981
Filed:
Mar. 23, 1978
Applicant:
Inventor:
Heinz Herzer, Burghausen, DE;
Assignee:
Wacker-Chemitronic Gesellschaft fur Elektronik-Grundstoffe mbH, Burghausen, DE;
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
C30B / ;
U.S. Cl.
CPC ...
156605 ; 156D / ; 176 10 ;
Abstract
A process for decreasing crystal damages in the production of n-doped silicon by neutron bombardment, in which phosphorus atoms are formed from silicon by nuclear transmutation, wherein the number of desired phosphorus atoms N.sub.31.sbsb.p per cc, can be calculated by the known equation