The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 14, 1980

Filed:

Feb. 12, 1979
Applicant:
Inventors:

Shuichi Sato, Beaverton, OR (US);

Tadanori Yamaguchi, Hillsboro, OR (US);

Assignee:

Tektronix, Inc., Beaverton, OR (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
357 42 ; 357 23 ; 357 41 ; 357 46 ; 357 55 ; 357 56 ;
Abstract

An improved, high speed n-channel MOS inverter structure including a self-aligned silicon gate depletion-mode load device integrated in series with a nonplanar, submicron channel enhancement-mode switching transistor. The enhancement-mode switching device is formed on a field of the substrate that includes an elevated, plateau region joined to a surrounding planar area by a slope. The MOS load transistor is formed on an adjoining planar portion of the surface. The process for fabricating the devices features successive ion implation of boron and arsenic through an oxide layer that includes a smoothly tapered 'beak' formed by a local oxidation technique.


Find Patent Forward Citations

Sato, Shuichi. (1980). Submicron channel length mos inverter with depletion-mode load transistor (U.S. Patent No. 4228447). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/4228447

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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