The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 11, 1977
Filed:
Aug. 16, 1976
Applicant:
Inventors:
Franklyn C Blaha, Glen Burnie, MD (US);
James R Cricchi, Catonsville, MD (US);
Marvin H White, Laurel, MD (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L / ; H01L / ; H01L / ;
U.S. Cl.
CPC ...
357 23 ; 357 54 ; 357-6 ;
Abstract
An improved drain source protected MNOS transistor is realized by means of a fabrication technique that permits independent control of memory and nonmemory parameters. Self alignment of memory regions during fabrication is achieved by using nitride masking for gate oxidation. Independent control of memory and nonmemory parameters derives from a device configuration in which protected regions consist exclusively of gate oxide and silicon nitride is present only in the memory regions. Transistor radiation hardening is also achieved by elimination of the nitride layer above the device's thin silicon dioxide regions.