The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 10, 2026

Filed:

Mar. 23, 2020
Applicant:

Micron Technology, Inc., Boise, ID (US);

Inventors:

Kyle K. Kirby, Eagle, ID (US);

Sarah A. Niroumand, Boise, ID (US);

Assignee:

Micron Technology, Inc., Boise, ID (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/768 (2006.01); H01L 23/00 (2006.01); H01L 23/48 (2006.01); H10W 20/00 (2026.01); H10W 20/20 (2026.01); H10W 72/20 (2026.01); H10W 72/29 (2026.01); H10W 72/90 (2026.01);
U.S. Cl.
CPC ...
H10W 20/023 (2026.01); H10W 20/20 (2026.01); H10W 72/20 (2026.01); H10W 72/244 (2026.01); H10W 72/29 (2026.01); H10W 72/923 (2026.01); H10W 72/942 (2026.01);
Abstract

Through vias and conductive routing layers in semiconductor substrates and associated methods of manufacturing are disclosed herein. In one embodiment, a method for processing a semiconductor substrate includes forming an aperture in a semiconductor substrate and through a dielectric on the semiconductor substrate. The aperture has a first end open at the dielectric and a second end opposite the first end. The method can also include forming a plurality of depressions in the dielectric, and simultaneously depositing a conductive material into the aperture and at least some of the depressions.


Find Patent Forward Citations

Quick Actions:

Kirby, Kyle. (2026). Vias and conductive routing layers in semiconductor substrates (U.S. Patent No. 12796419). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12796419

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