The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 20, 2026
Filed:
Mar. 15, 2024
Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu, TW;
Chia-Hsi Wang, Hsinchu City, TW;
Yen-Yu Chen, Hsinchu City, TW;
Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu, TW;
Abstract
A sealing monitoring device for a chamber includes a support attached to a front of a sputtering target, and a pressure sensor attached to the support. The sensor is positioned vertically between the front of the target and a parallel top of a shield of the chamber parallel, and laterally positioned at a location adjacent to a sealing device of the chamber. The sensor is configured to sense a pressure at the location, and accordingly generates a voltage signal, which can be utilized by a processor to determine a sealing condition of the sealing device adjacent to the location.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile