The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 20, 2026
Filed:
Feb. 07, 2025
Screen Holdings Co., Ltd., Kyoto, JP;
Ichiro Mitsuyoshi, Kyoto, JP;
Tadashi Maegawa, Kyoto, JP;
Hidehiko Ozaki, Kyoto, JP;
Nozomu Nakagawa, Kyoto, JP;
SCREEN Holdings Co., Ltd., Kyoto, JP;
Abstract
A substrate processing method including: a disassembly process of disassembling a temporary batch lot by dividing substrates into a first set and a second set such that two substrates facing each other among substrates constituting the temporary batch lot form different sets and moving the first set and the second set relative to each other in a direction orthogonal to an arrangement direction of the substrates; a half-rotation process of orienting the substrates constituting the second set in a direction opposite to the one direction by half-rotating the second set; and a rearrangement process of combining the first set and the second set to generate a batch lot such that the substrates oriented in the one direction and the substrates oriented in the opposite direction are alternately arranged.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile