The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 13, 2026
Filed:
Jul. 02, 2024
Tokyo Electron Limited, Tokyo, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
Abstract
A separating apparatus includes a notch device configured to form a notch by inserting a sharp member into a side surface located most adjacent to a separation start point; a first holder including a start point side attraction member and a start point side elevating mechanism; a second holder configured to attract and hold a second substrate; a detection device; and a controller configured to form the notch in the side surface, and lower the start point side attraction member to attract it to a first substrate. The controller moves the start point side attraction member from a standby position to a speed-change position at a first speed; moves the start point side attraction member from the speed-change position to be close to the first substrate at a second speed; and stops the start point side attraction member when it is determined that the first substrate is attracted.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile