The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 22, 2026
Filed:
Jan. 22, 2024
Applicant:
Tokyo Electron Limited, Tokyo, JP;
Inventors:
Yutai Matsuhashi, Iwate, JP;
Tsutomu Sugawara, Iwate, JP;
Shigehisa Hayashi, Yamanashi, JP;
Tadashi Enomoto, Iwate, JP;
Assignee:
TOKYO ELECTRON LIMITED, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G05B 19/418 (2006.01);
U.S. Cl.
CPC ...
G05B 19/4185 (2013.01); G05B 19/4183 (2013.01); G05B 2219/34308 (2013.01);
Abstract
An information collection device includes a power supply unit that supplies power to operate the information collection device; an input unit that is connected to a sensor capable of detecting a state of the substrate processing apparatus and inputs sensor data indicating the state of the substrate processing apparatus detected by the sensor, a relay unit that relays transmission of the sensor data; and a control unit that collects the sensor data input by the input unit through the relay unit.