The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 22, 2026
Filed:
Jan. 04, 2023
Asml Netherlands B.v., Veldhoven, NL;
Naveen Kumar Sankaran, Norwalk, CT (US);
ASML NETHERLANDS B.V., Veldhoven, NL;
Abstract
An inspection system includes a body that is configured to be inserted into a lithography apparatus, to be engaged by a tool handler of the lithography apparatus, and to be used for inspecting a portion of the lithography apparatus. A sensor is coupled to the body, and configured to obtain an image of the portion of the lithography apparatus when the body is positioned by the tool handler. Software is configured to receive the images and facilitate semi-automated or automated inspection of the portion of the lithography apparatus based on the one or more images. The system may use less time for inspection, may produce consistent imaging resolution and clarity, may not require opening or other disassembly of the lithography apparatus, may reduce impact on a lithography apparatus micro-environment and the potential for contamination, and/or may have one or more additional or other advantages.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile