The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 15, 2026
Filed:
Jul. 11, 2024
Samsung Electronics Co., Ltd., Suwon-si, KR;
Jongbeom Moon, Suwon-si, KR;
Hadong Jin, Suwon-si, KR;
Kyung-Sun Kim, Suwon-si, KR;
Sung-Yeol Kim, Suwon-si, KR;
Hyosin Kim, Suwon-si, KR;
Donghyeon Na, Suwon-si, KR;
Chunyoon Park, Suwon-si, KR;
Sungyong Lim, Suwon-si, KR;
Samsung Electronics Co., Ltd., Suwon-si, KR;
Abstract
Various example embodiments of the present disclosure provide a substrate processing apparatus including a chamber, an excitation power supply configured to generate a supply power for plasma excitation, a support inside the chamber configured to support a substrate, and a filter connected to the support. The filter is configured to change frequency characteristics of the supply power by changing an impedance of the filter based on a change in an output level of the excitation power supply.