The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 15, 2026
Filed:
Mar. 24, 2021
Applicant:
Lam Research Corporation, Fremont, CA (US);
Inventors:
Sivananda Krishnan Kanakasabapathy, Pleasanton, CA (US);
Samantha S.H. Tan, Newark, CA (US);
Jengyi Yu, San Ramon, CA (US);
Younghee Lee, Pleasanton, CA (US);
Alan J. Jensen, Mountain House, CA (US);
Da Li, Newark, CA (US);
Assignee:
Lam Research Corporation, Fremont, CA (US);
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/004 (2006.01); G03F 7/16 (2006.01); G03F 7/20 (2006.01); H10P 76/20 (2026.01);
U.S. Cl.
CPC ...
G03F 7/0042 (2013.01); G03F 7/167 (2013.01); G03F 7/2004 (2013.01); H10P 76/2041 (2026.01);
Abstract
The present disclosure relates to stacks having a sensitized resist film, as well as methods and apparatuses for applying such sensitized films. In particular embodiments, the sensitizer can be provided in gas form, and unreacted sensitizer precursors can be recovered after a deposition step.