The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 08, 2026
Filed:
May. 25, 2023
Asml Netherlands B.v., Veldhoven, NL;
Maarten Jozef Jansen, Hoogeloon, NL;
Willem Herman Gertruda Anna Koenen, Roermond, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A method to determine an absolute position of a first movable object using an interferometer system is described, said method comprising: providing first and second beams with a first light frequency from a first light source; providing further first and further second beams with a second (tunable) light frequency from a second light source; guiding the first and further first beams along a first axis to a reflective surface of the first object to obtain a first interferometer signal and guiding the second and further second beams along a second axis to a reflective surface of a second object to obtain a second interferometer signal, while changing the tunable frequency, detecting the first and further first interferometer signals, detecting the second and further second interferometer signals, determining a first count offset and/or a further first count offset using a non-linear equation, and determining the absolute position of the first object.