The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 25, 2026
Filed:
Dec. 08, 2023
Applicant:
Fei Company, Hillsboro, OR (US);
Inventors:
Radovan Vašina, Brno, CZ;
Bohuslav Sed'a, Blansko, CZ;
Marek Uncovský, Bílovice and Svitavou, CZ;
Magdalena Špoková, Ostrava, CZ;
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/12 (2006.01); H01J 37/09 (2006.01); H01J 37/26 (2006.01); H01J 37/28 (2006.01);
U.S. Cl.
CPC ...
H01J 37/12 (2013.01); H01J 37/09 (2013.01); H01J 37/265 (2013.01); H01J 37/28 (2013.01);
Abstract
Objective lenses, charged particle microscopes including the same, and associated methods are disclosed herein. An objective lens can include a lens body, a shielding electrode, and a steering electrode. The objective lens is configured such that varying a steering electrode voltage adjusts a location of a main objective plane of the objective lens to vary a focal working distance of the objective lens. A method can include positioning a sample relative to an objective lens and operating the objective lens to focus a charged particle beam to a focus location.