The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 25, 2026
Filed:
Mar. 03, 2023
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Asml Netherlands B.v., Veldhoven, NL;
Alexander Petrus Josephus Van Lankvelt, Veldhoven, NL;
Michiel Vervoordeldonk, Veldhoven, NL;
Pavel Kagan, Abtsgmuend, DE;
Marc Wilhelmus Maria Van Der Wijst, Veldhoven, NL;
Galip Tuna Turkbey, Veldhoven, NL;
Marco Huiskamp, Veldhoven, NL;
Ulrich Schoenhoff, Ulm, DE;
CARL ZEISS SMT GMBH, Oberkochen, DE;
ASML NETHERLANDS B.V., Veldhoven, NL;
Abstract
A vibration isolator () for supporting a payload and isolating the payload from vibrations has a contact member () configured for supporting the payload, at least two pressurized gas compartments () arranged offset from each other to support the contact member at different locations, which pressurized gas compartments are connected to each other via a tubing system (). The tubing system contains at least one restriction () at which a cross section of the tubing system is reduced by at least 50%.