The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 25, 2026
Filed:
Jul. 07, 2023
Applicants:
Soitec, Bernin, FR;
Commissariat À L'énergie Atomique ET Aux Énergies Alternatives, Paris, FR;
Inventors:
Bruno Ghyselen, Bernin, FR;
Thierry Salvetat, Grenoble Cedex, FR;
Guillaume Berre, Grenoble Cedex, FR;
François Rieutord, Grenoble Cedex, FR;
Assignees:
Soitec, Bernin, FR;
Commissariat À L'énergie Atomique Et Aux Énergies, Paris, FR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B81C 1/00 (2006.01); H10P 90/00 (2026.01); H10W 10/10 (2026.01);
U.S. Cl.
CPC ...
B81C 1/00182 (2013.01); B81C 1/00047 (2013.01); H10P 90/1916 (2026.01); H10W 10/181 (2026.01); B81C 2201/0194 (2013.01);
Abstract
A method for manufacturing a structure comprising membranes overhanging cavities, comprises: A specific area is defined around each cavity in the plane of the contact interface and is expressed as a function of half of the spacing. The area, the depth of each cavity, and the specific area are defined in step a) to satisfy a particular relationship.