The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 11, 2026
Filed:
Aug. 08, 2024
Kla Corporation, Milpitas, CA (US);
Arjun Hegde, Fremont, CA (US);
Surajit Mondal, Chennai, IN;
Balla Guna Sai Sandeep, Chennai, IN;
Chandrashekaran Gurumurthy, Chennai, IN;
KLA Corporation, Milpitas, CA (US);
Abstract
A system may be configured to receive training images of features on the sample. The system may be configured to generate a segmentation model based on the training images. The system may be configured to receive product images of product features and identify, using the segmentation model, features of interest based on the product images. The system may be configured to generate a segmentation model image including segmentation masks corresponding to the identified features of interest and adjust a size of the segmentation masks based on a size of the identified features of interest. The system may be configured to determine a difference-based attribute value for each identified feature of interest based on the adjusted size of the segmentation masks. The system may be configured to determine whether each of the identified features of interest are defects based on the difference-based attribute value and a predetermined threshold.