The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 11, 2026
Filed:
Sep. 04, 2024
Kla Corporation, Milpitas, CA (US);
Warren Oliver, Knoxville, TN (US);
Jennifer Hay, Farragut, TN (US);
KLA Corporation, Milpitas, CA (US);
Abstract
An optical detector determines a relative depth between a first position and a second position on an inclined surface. A controller determines a slope of the inclined surface based on the relative depth between the first position and the second position and the distance moved between positions. An actuator displaces a punch at a plurality of intermediate positions on the inclined surface located between the first position and the second position. A displacement detector determines a depth at which the sample is touched by the punch at each of the plurality of intermediate positions. The controller further determines a calculated depth of the inclined surface at each of the plurality of intermediate positions based on the slope of the inclined surface and the distance moved between positions. The controller further compares the depth measured by the displacement detector to each corresponding calculated depth to verify accuracy of the displacement detector.