Semiconductor structure with different distances between gates and source contacts, and method of manufacturing the same

Abstract

A method for manufacturing a semiconductor structure is provided. A first layout is received, wherein the first layout comprises at least a pattern of an active region extending in a first direction. A second layout comprising a plurality of gate patterns extending in a second direction substantially perpendicular to the first direction is received, wherein distances between adjacent gate patterns are substantially consistent among the plurality of gate patterns. The first layout and the second layout are overlapped, thereby forming a plurality of transistor patterns. One of the plurality of gate patterns is shifted toward a source of one of the transistor patterns to form a third layout. A first photomask including the third layout is formed. The third layout of the photomask is transferred to form a plurality of gate structures over a substrate. A semiconductor structure thereof is also provided.