The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 04, 2026

Filed:

Jan. 23, 2024
Applicant:

Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu, TW;

Inventors:

Zhi-Ren Xiao, Hsinchu County, TW;

Nuo Xu, San Jose, CA (US);

Chih-Ching Wang, Kinmen County, TW;

Jon-Hsu Ho, New Taipei City, TW;

Chung-Wei Wu, Ju-Bei City, TW;

Zhiqiang Wu, Hsinchu County, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H10D 64/23 (2025.01); H10D 30/01 (2025.01); H10D 30/43 (2025.01); H10D 30/67 (2025.01); H10D 62/10 (2025.01); H10D 64/01 (2025.01); H10D 84/83 (2025.01);
U.S. Cl.
CPC ...
H10D 64/258 (2025.01); H10D 30/014 (2025.01); H10D 30/43 (2025.01); H10D 30/6735 (2025.01); H10D 30/6757 (2025.01); H10D 62/121 (2025.01); H10D 64/017 (2025.01); H10D 64/018 (2025.01); H10D 84/83 (2025.01);
Abstract

A semiconductor structure includes a substrate, nanostructures, source/drain features, a gate structure, and inner spacers. The nanostructures are over the substrate and spaced apart from each other in a Z-direction. The source/drain features are electrically connected to and on opposite sides of the nanostructures in an X-direction. The gate structure extends in a Y-direction and wraps around the nanostructures. The inner spacers are between the nanostructures in the Z-direction. Each of the inner spacers includes a soft core layer and a hard liner layer wrapping around the soft core layer.


Find Patent Forward Citations

Xiao, Zhi-Ren. (2026). Semiconductor structure and method for manufacturing the same (U.S. Patent No. 12701769). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12701769

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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