The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 04, 2026
Filed:
May. 11, 2023
Applicant:
Asml Netherlands B.v., Veldhoven, NL;
Inventor:
Marco Jan-Jaco Wieland, Delft, NL;
Assignee:
ASML Netherlands B.V., Veldhoven, NL;
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/317 (2006.01);
U.S. Cl.
CPC ...
H01J 37/3177 (2013.01); H01J 2237/0453 (2013.01); H01J 2237/04926 (2013.01); H01J 2237/1534 (2013.01);
Abstract
Objective lens array assemblies and associated methods are disclosed. In one arrangement, the objective lens array assembly focuses a multi-beam of sub-beams on a sample. Planar elements define a plurality of apertures aligned along sub-beam paths. An objective lens array projects the multi-beam towards a sample. Apertures of one or more of the planar elements compensate for off-axis aberrations in the multi-beam.
Wieland, Marco Jan-Jaco. (2026). Objective lens array assembly, electron-optical system, electron-optical system array, method of focusing (U.S. Patent No. 12700566). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12700566
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile