The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 28, 2026
Filed:
Jan. 17, 2024
Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu, TW;
Chao-Hsuan Chen, Hsinchu, TW;
I-Wei Yang, Yilan, TW;
Shu-Yuan Ku, Hsinchu, TW;
Ryan Chia-Jen Chen, Hsinchu, TW;
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., Hsinchu, TW;
Abstract
Embodiments of the present disclosure provide a method for forming a semiconductor device structure. The method includes forming a fin structure over a substrate, forming an insulating material adjacent the fin structure, depositing a gate dielectric layer over the fin structure and the insulating material, depositing a gate electrode layer on the gate dielectric layer, forming an opening through the gate electrode layer and the gate dielectric layer into the insulating material, then performing an etch process that etches the gate dielectric layer at a faster rate than the gate electrode layer, and filling the opening with a dielectric material.