Field-effect transistors with self-aligned p-shield contacts

Abstract

Structures for a field-effect transistor and methods of forming a structure for a field-effect transistor. The structure comprises a semiconductor substrate including a first doped region, a second doped region, a third doped region, and a trench that includes a trench bottom, a first sidewall, and a second sidewall opposite to the first sidewall. The first doped region is disposed adjacent to the first sidewall of the trench, the second doped region is disposed adjacent to the second sidewall of the trench, the third doped region is disposed adjacent to the trench bottom of the trench. The third doped region connects the first doped region to the second doped region, and the first doped region, the second doped region, and the third doped region have a conductivity type. The structure further comprises a gate structure in the trench.