The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 28, 2026
Filed:
Sep. 20, 2021
Kla Corporation, Milpitas, CA (US);
Stilian Ivanov Pandev, Santa Clara, CA (US);
KLA Corporation, Milpitas, CA (US);
Abstract
Methods and systems for measuring semiconductor structures based on a trained scanning conditional measurement model are described herein. A scanning conditional model is trained based on Design Of Experiments (DOE) measurement data associated with known values of one or more parameters of interest and a set of perturbed values of the one or more parameters of interest. The trained conditional model minimizes the output of an error function characterizing the error between the known values of the perturbed values of the one or more parameters of interest for the given DOE measurement data. During inference, an error value associated with each candidate value of one or more parameters of interest is determined by the trained scanning conditional measurement model. The estimated value of the parameter of interest is the candidate value of the parameter of interest associated with the minimum error value.