The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 28, 2026

Filed:

Sep. 24, 2024
Applicant:

Lasertec Corporation, Yokohama, JP;

Inventors:

Ko Gondaira, Yokohama, JP;

Kosei Ishibashi, Yokohama, JP;

Hirokazu Seki, Yokohama, JP;

Assignee:

LASERTEC CORPORATION, Yokohama, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/88 (2006.01); G01N 21/956 (2006.01); G03F 1/84 (2012.01);
U.S. Cl.
CPC ...
G01N 21/8806 (2013.01); G01N 21/956 (2013.01); G03F 1/84 (2013.01); G01N 2021/8835 (2013.01); G01N 2021/95676 (2013.01); G01N 2201/021 (2013.01); G01N 2201/025 (2013.01); G01N 2201/068 (2013.01);
Abstract

A light source apparatus according to the present disclosure includes an input optical system including a first optical member configured to irradiate a target material with excitation light, an output optical system including a second optical member configured to extract light generated by irradiating the target material with the excitation light, a target holding unit configured to hold the target material, an acquiring unit configured to acquire displacement of a surface position of the target material, a driving unit configured to cause relative positions of an optical member and the target holding unit to vary, the optical member including at least one of the first optical member and the second optical member, and a control unit configured to drive the driving unit based on the displacement.


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