The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 21, 2026
Filed:
Jun. 27, 2019
Asml Netherlands B.v., Veldhoven, NL;
Bert Dirk Scholten, Best, NL;
Peter Andreas Maria Billekens, Meterik, NL;
Tiannan Guan, Best, NL;
Tjarco Lindeijer, Eindhoven, NL;
Harold Anton Mehagnoul, Eindhoven, NL;
Jimmy Matheus Wilhelmus Van De Winkel, Kessel, NL;
Cas Johannes Petrus Maria Van Nuenen, Eindhoven, NL;
Hendrikus Theodorus Jacobus Franciscus Van Verseveld, Eindhoven, NL;
Marcus Martinus Petrus Adrianus Vermeulen, Leende, NL;
ASML NETHERLANDS B.V., Veldhoven, NL;
Abstract
A tool for modifying substrate support elements of a substrate holder, the substrate support elements having support surfaces for supporting a substrate, the tool includes a main body having a main body surface, and multiple protrusions from the main body surface, the multiple protrusions having distal ends configured to contact the support surfaces to modify the substrate support elements. Furthermore, a lithographic apparatus and a method comprising such a tool are provided.