The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 14, 2026

Filed:

Jun. 28, 2024
Applicant:

Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu, TW;

Inventors:

Wei-Chih Chen, Taichung City, TW;

Shi-Chi Chen, Taichung City, TW;

Ting-Wei Wang, Taichung City, TW;

Jen-Ti Wang, Taichung City, TW;

Kuo-Fong Chuang, Taoyuan City, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/677 (2006.01); H01L 21/67 (2006.01); H10P 72/00 (2026.01); H10P 72/30 (2026.01);
U.S. Cl.
CPC ...
H10P 72/3221 (2026.01); H10P 72/0606 (2026.01); H10P 72/3202 (2026.01);
Abstract

A method includes moving a wafer transport device on a transport rail, wherein the wafer transport device comprises a hoist unit configured to grip a wafer container unit; stopping the wafer transport device above a load port; after stopping the wafer transport device, reading data of a rail mark located on the transport rail; aligning an orientation of the wafer transport device according to the data of the rail mark; after aligning the orientation of the wafer transport device according to the data of the rail mark, aligning the wafer transport device with respect to a top surface of the load port; after aligning the wafer transport device with respect to the top surface of the load port, lowering the hoist unit.


Find Patent Forward Citations

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Chen, Wei-Chih. (2026). Method for transporting wafers (U.S. Patent No. 12685081). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12685081

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