The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 14, 2026
Filed:
Nov. 09, 2021
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Kostiantyn Achkasov, Lyons, FR;
Peter Reimer, San Jose, CA (US);
Shawn Thanhson Le, San Jose, CA (US);
Sohrab Zokaei, Los Altos, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); G05B 19/418 (2006.01); H10P 72/00 (2026.01); H01J 37/32 (2006.01);
U.S. Cl.
CPC ...
H10P 72/0612 (2026.01); G05B 19/41875 (2013.01); G05B 2219/45031 (2013.01); H01J 37/32917 (2013.01); H01J 2237/24585 (2013.01);
Abstract
Exemplary diagnostic wafers for a semiconductor processing chamber may include a wafer body defining a plurality of recesses. The diagnostic wafers may include at least one data logging puck positionable within one of the plurality of recesses. The diagnostic wafers may include at least one battery puck positionable within one of the plurality of recesses. The diagnostic wafers may include at least one sensor puck positionable within one of the plurality of recesses.