The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 14, 2026

Filed:

Jun. 12, 2023
Applicant:

Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu, TW;

Inventors:

Bo-Jiun Lin, Hsinchu County, TW;

Tsung-En Lee, Taipei City, TW;

Tung-Ying Lee, Hsinchu City, TW;

Chao-Ching Cheng, Hsinchu City, TW;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H10D 64/68 (2025.01); H10D 30/01 (2025.01); H10D 30/60 (2025.01);
U.S. Cl.
CPC ...
H10D 64/691 (2025.01); H10D 30/021 (2025.01); H10D 30/60 (2025.01); H10D 64/685 (2025.01);
Abstract

A semiconductor device and a manufacturing method thereof are provided. The semiconductor device includes a channel layer, an adhesion layer disposed over the channel layer, a first hafnium-containing dielectric layer disposed over the adhesion layer, a second hafnium-containing dielectric layer disposed over the first hafnium-containing dielectric layer, a gate structure, and source and drain terminals. The second hafnium-containing dielectric layer has a hafnium content lower than a hafnium content of the first hafnium-containing dielectric layer. A dielectric constant of the second hafnium-containing dielectric layer is larger than a dielectric constant of the first hafnium-containing dielectric layer.


Find Patent Forward Citations

Loading…