The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 14, 2026
Filed:
Aug. 18, 2021
Applicant:
Basf SE, Ludwigshafen am Rhein, DE;
Inventors:
Francisco Javier Lopez Villanueva, Ludwigshafen, DE;
Andreas Klipp, Ludwigshafen, DE;
Sabine Frischhut, Ludwigshafen, DE;
Chih Hui Lo, Taoyuan, TW;
Mei Chin Shen, Taoyuan, TW;
Assignee:
BASF SE, Ludwigshafen am Rhein, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C09K 13/00 (2006.01); H10P 50/64 (2026.01);
U.S. Cl.
CPC ...
C09K 13/00 (2013.01); H10P 50/642 (2026.01);
Abstract
Disclosed herein is a composition for selectively etching a layer including a silicon germanium alloy (SiGe) in the presence of a layer including silicon, the composition including: