The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 07, 2026

Filed:

May. 19, 2022
Applicant:

Panjit International Inc., Kaohsiung, TW;

Inventors:

Che-Ming Lin, New Taipei, TW;

Jong Ho Park, Kaohsiung, TW;

Kwang Yeon Jun, New Taipei, TW;

Assignee:

PANJIT INTERNATIONAL INC., Kaohsiung, TW;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H10D 62/10 (2025.01); H01L 21/265 (2006.01); H01L 21/761 (2006.01); H01L 21/765 (2006.01); H10D 64/00 (2025.01); H10P 30/20 (2026.01); H10W 10/00 (2026.01); H10W 10/30 (2026.01); H10W 10/50 (2026.01);
U.S. Cl.
CPC ...
H10D 62/111 (2025.01); H10D 64/111 (2025.01); H10P 30/204 (2026.01); H10P 30/21 (2026.01); H10W 10/031 (2026.01); H10W 10/051 (2026.01); H10W 10/30 (2026.01); H10W 10/50 (2026.01);
Abstract

A semiconductor device and a manufacturing method thereof are provided. The manufacturing method includes steps of: depositing an N-drift layer on a substrate, conducting an ion implant process on the N-drift layer to form a plurality of P-type pillars, depositing a N-type epitaxial layer on the P-type pillars, conducting an ion implant process on the N-type epitaxial layer to form a first P-type epitaxial layer and at least one localized P region, conducting a field oxidation to the first P-type epitaxial layer to form a second P-type epitaxial layer, and forming a field oxide layer on the first P-type epitaxial layer and the N-type epitaxial layer. The localized P region passes though the N-type epitaxial layer to the field oxide layer.


Find Patent Forward Citations

Loading…