The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 07, 2026

Filed:

Mar. 31, 2021
Applicant:

Hitachi High-tech Corporation, Tokyo, JP;

Inventors:

Yuji Asakura, Tokyo, JP;

Michio Hatano, Tokyo, JP;

Mitsuhiro Nakamura, Tokyo, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/20 (2006.01); H01J 37/28 (2006.01);
U.S. Cl.
CPC ...
H01J 37/20 (2013.01); H01J 37/28 (2013.01);
Abstract

The performance of a sample holder that is fillable with a liquid sample is improved. A sample holderincludes: an upper tipthat is disposed on an irradiation side of an electron beam; and a lower tipthat is disposed to face the upper tip. At this time, the sample holderincludes: a diaphragmthat is provided in the upper tip; a diaphragmthat is provided in the lower tip; a spacethat is interposed between the diaphragmand the diaphragmand is fillable with a liquid; and a guide portionthat guides a liquid having an amount exceeding an amount of liquid with which the spaceis fillable so as to be dropped from a side opposite to the irradiation side of the electron beam.


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