The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 30, 2026
Filed:
Sep. 14, 2022
Lam Research Corporation, Fremont, CA (US);
Alexander Miller Paterson, San Jose, CA (US);
Daniel Guzman, San Jose, CA (US);
William T. Hart, Castro Valley, CA (US);
Cristian Siladie, San Ramon, CA (US);
Michael John Martin, Fremont, CA (US);
Yuhou Wang, Fremont, CA (US);
Michael Drymon, Diablo Grande, CA (US);
John Drewery, San Jose, CA (US);
Eduardo Castanos-Martinez, Foster City, CA (US);
Jorge Luque, Redwood City, CA (US);
Lam Research Corporation, Fremont, CA (US);
Abstract
A plasma processing chamber has an upper window with a coil disposed above the upper window. A coil connection enclosure is disposed above the coil. A metrology enclosure is disposed above the coil connection enclosure. A spectral reflectometry system is disposed within the metrology enclosure. The spectral reflectometry system includes an optical collimator positioned to direct a beam of light through an opening in the metrology enclosure, an opening in the coil connection enclosure, and the upper window into the plasma processing chamber. The optical collimator is also configured to receive reflected light from within the plasma processing chamber, where the reflected light passes through the upper window and through the opening in the coil connection enclosure and through the opening in the metrology enclosure. A tip angle and a tilt angle of the optical collimator are remotely adjusted to optimize an orientation of the optical collimator.