The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 30, 2026

Filed:

Nov. 24, 2020
Applicant:

Lam Research Corporation, Fremont, CA (US);

Inventors:

Collin Michael Anderson, Berkeley, CA (US);

Roderick Mosely, Pleasanton, CA (US);

Nerissa Sue Draeger, Fremont, CA (US);

Jerome S. Hubacek, Fremont, CA (US);

Assignee:

Lam Research Corporation, Fremont, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 21/14 (2006.01); G01N 21/47 (2006.01); G01N 21/88 (2006.01); G02B 21/00 (2006.01); G02B 21/08 (2006.01);
U.S. Cl.
CPC ...
G02B 21/14 (2013.01); G01N 21/4795 (2013.01); G01N 21/8806 (2013.01); G01N 21/8851 (2013.01); G02B 21/0032 (2013.01); G02B 21/0036 (2013.01); G02B 21/082 (2013.01);
Abstract

Various embodiments include reflective-mode Fourier ptychographic microscope (RFPM) apparatuses and methods for using the RFPM. In one example, the RFPM includes a multiple-component light source configured to direct radiation to a surface. The multiple-component light source has a number of individual-light sources, each of which is configured to be activated individually. The RFPM further includes collection optics to receive radiation reflected and scattered or otherwise redirected from the surface, and a sensor element to convert received light-energy from the collection optics into an electrical-signal output. Other apparatuses, designs, and methods are disclosed.


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