The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 30, 2026
Filed:
Mar. 22, 2023
Tokyo Electron Limited, Tokyo, JP;
Shinjiro Watanabe, Yamanashi, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
An inspection apparatus for electrical inspection of a substrate is provided. The inspection apparatus includes: a probe card including a plurality of probes; a stage on which the substrate is placed, the stage being configured to move the substrate relative to the probe card and to bring the substrate into contact with the probes; and a controller configured to control a movement of the stage. The controller calculates, using a first displacement amount based on a vertical load of the probe card and a second displacement amount based on an unbalanced load of the probe card that is inclined with respect to the vertical load, a three-dimensional correction amount for the unbalanced load of the probe card, and the controller moves the stage based on the three-dimensional correction amount.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile