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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12664637 B1

PDFFull Text
Date of Patent:
Jun. 23, 2026

Filed:

May. 24, 2022

Method and apparatus for analyzing an image of a microlithographic microstructured component

Applicant:

Carl Zeiss Smt Gmbh, Oberkochen, DE;

Inventors:

Mario Laengle, Jena, DE;

Dmitry Klochkov, Schwaebisch Gmuend, DE;

Assignee:

Carl Zeiss SMT GmbH, Oberkochen, DE;

Attorney:

Fish & Richardson P.C.

Primary Examiner:

Andrew M Moyer

Assistant Examiner:

Dylan John Mendez undefined Muniz

Int. Cl.
CPC ...
G06V 20/69 (2022.01); G06T 7/00 (2017.01); G06T 7/11 (2017.01); G06T 7/12 (2017.01); G06T 7/13 (2017.01); G06V 10/26 (2022.01); G06V 10/30 (2022.01); G06V 10/44 (2022.01); G06V 30/20 (2022.01);
U.S. Cl.
CPC ...
G06T 7/0004 (2013.01); G06T 7/12 (2017.01); G06V 10/26 (2022.01); G06V 10/30 (2022.01); G06V 10/457 (2022.01); G06V 20/695 (2022.01); G06V 20/698 (2022.01); G06T 2207/30148 (2013.01); G06V 2201/06 (2022.01);
Abstract

The invention relates to a method and to an apparatus for analyzing an image of a microlithographic microstructured component wherein in the image each of a multiplicity of pixels is assigned in each case an intensity value. A method according to the invention comprises the following steps: isolating a plurality of edge fragments in the image; classifying each of the isolated edge fragments either as a relevant edge fragment or as an irrelevant edge fragment; and ascertaining contiguous segments in the image based on the relevant edge fragments.

Find Patent Forward Citations

Laengle, Mario. (2026). Method and apparatus for analyzing an image of a microlithographic microstructured component (U.S. Patent No. 12664637). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12664637

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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