The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 23, 2026
Filed:
Jun. 24, 2022
Kla Corporation, Milpitas, CA (US);
Sameet K. Shriyan, Milpitas, CA (US);
Frank Essmeier, Milpitas, CA (US);
Hedong Yang, Santa Clara, CA (US);
KLA Corporation, Milpitas, CA (US);
Abstract
A multi-beam system includes a light source configured to emit light; a fiber bundle connected to the light source; and a camera configured to capture an image set including images corresponding to each fiber connected to the light source. The fiber bundle includes a central fiber having one end connected to the light source, and N layers of fibers surrounding the central fiber. The first layer of fibers includes M fibers, each having one end connected to the light source, and the Nth layer of fibers includes more than M fibers, but only M fibers in the Nth layer of fibers have one end connected the light source. A processor is configured to determine a centroid of each image in the image set to produce a centroid map and generate a fiber location map comprising fiber locations of all fibers in the fiber bundle based on the centroid map.