The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 16, 2026
Filed:
Aug. 04, 2024
Kla Corporation, Milpitas, CA (US);
Raghavan Konuru, Kurnool, IN;
Jeetsagar Ghorai, Chennai, IN;
Jacob George, Cochin, IN;
Niveditha Lakshminarasimhan, Chennai, IN;
Sairam Ravu, Chennai, IN;
Saravanan Paramasivam, Chennai, IN;
Martin Plihal, Pleasanton, CA (US);
Prasanti Uppaluri, Saratoga, CA (US);
KLA Corporation, Milpitas, CA (US);
Abstract
Methods and systems for selecting modes for a mode selection process are provided. One system includes a computer subsystem configured for determining information for a specimen and at least one value of a characteristic of the information from images generated for the specimen with an initial subset of different modes of an imaging subsystem. The computer subsystem is also configured for predicting probabilities that better values of the characteristic are determined from the images generated with the different modes other than the initial subset based on the determined at least one value of the characteristic and a relationship between the different modes and associated values of the characteristic of the information. In addition, the computer subsystem is configured for selecting an additional subset of the different modes for which the generating and determining steps are performed next by the imaging and computer subsystems, respectively, based on the predicted probabilities.