The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 16, 2026

Filed:

Sep. 25, 2023
Applicant:

Ict Integrated Circuit Testing Gesellschaft Für Halbleiterprüftechnik Mbh, Heimstetten, DE;

Inventor:

Stephan Heinrich, Munich, DE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/147 (2006.01);
U.S. Cl.
CPC ...
H01J 37/147 (2013.01); H01J 2237/036 (2013.01);
Abstract

A proximity-electrode for a charged particle beam device is provided, the proximity-electrode including a body having an aperture within the body, and the body having a plurality of protrusions cantilevering radially into the aperture, and the aperture and the protrusions having an n-fold rotational symmetry, where n is an integer.


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Heinrich, Stephan. (2026). Proximity-electrode, charged particle beam device and method for inspecting and/or imaging a sample (U.S. Patent No. 12658401). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12658401

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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