logo

For the Inventor, By the Inventor

The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12656246 B1

PDFFull Text
Date of Patent:
Jun. 16, 2026

Filed:

Jan. 22, 2024

Methods of imaging path polarization control for defect detection sensitivity enhancement

Applicant:

Kla Corporation, Milpitas, CA (US);

Inventors:

Yun Xie, Shanghai, CN;

Rui-Fang Shi, Cupertino, CA (US);

Xin Ye, Shanghai, CN;

Heng Zhang, Shanghai, CN;

Assignee:

KLA Corporation, Milpitas, CA (US);

Attorney:

Entropy Matters LLC

Primary Examiner:

Uzma Alam

Assistant Examiner:

Fani Polyzos Boosalis

Int. Cl.
CPC ...
G01N 21/21 (2006.01); G01N 21/956 (2006.01);
U.S. Cl.
CPC ...
G01N 21/21 (2013.01); G01N 21/956 (2013.01); G01N 2021/95676 (2013.01); G01N 2201/061 (2013.01); G01N 2201/0683 (2013.01);
Abstract

Methods and systems for inspecting a photomask are provided. One system includes an illumination subsystem configured to direct light to the photomask. The system also includes a pupil filter positioned in a path of only the light from the photomask and configured for controlling a polarization of the light in the path by mixing four elements in a Jones matrix for the photomask in a coherent manner. In addition, the system includes a detector configured for detecting the light from the pupil filter and generating output responsive to the detected light. The system further includes a computer subsystem configured for detecting defects on the photomask based on the output.

Find Patent Forward Citations

Quick Actions:

Xie, Yun. (2026). Methods of imaging path polarization control for defect detection sensitivity enhancement (U.S. Patent No. 12656246). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12656246

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Loading…