The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 09, 2026
Filed:
Oct. 16, 2023
Applicant:
Hitachi, Ltd., Tokyo, JP;
Inventors:
Assignee:
Hitachi, Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 21/04 (2006.01); G01Q 30/02 (2010.01); G01Q 70/14 (2010.01); G02B 21/00 (2006.01);
U.S. Cl.
CPC ...
G02B 21/04 (2013.01); G01Q 30/025 (2013.01); G01Q 70/14 (2013.01); G02B 21/0076 (2013.01);
Abstract
A scanning probe microscope for determining a measurement location when a numerical aperture of an objective lens is relatively large. The scanning probe microscope includes a probe which scans a sample; a light source which irradiates the probe with excitation light via an objective lens; a detector which detects fluorescence generated at the probe; a reflective member arranged between the objective lens and the sample; and an imaging device which images a reflecting surface of the reflective member.