The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 02, 2026
Filed:
Oct. 16, 2024
Tokyo Electron Limited, Tokyo, JP;
So Osada, Kikuchi-gun, JP;
Katsuya Okuda, Kumamoto, JP;
Naohiro Iwanaga, Koshi City, JP;
Kazuki Kosai, Koshi City, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A liquid supply device includes a tank storing a processing liquid, a circulation line, a pump, and a supply line for supplying the processing liquid to a liquid processor. The circulation line includes a main line, and first and second branch lines branching from the main line. The supply line includes first and second supply lines connected to the first and second branch lines, respectively. The first and second branch lines includes first and second heating mechanisms, first and second filters, first and second drain lines for draining the processing liquid, first and second branch circulation lines for returning the processing liquid to the tank, and first and second valves provided to switch a destination of the processing liquid, respectively.