The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 02, 2026

Filed:

Aug. 08, 2022
Applicant:

Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu, TW;

Inventors:

Li-Fong Lin, Hsinchu, TW;

Wen-Kai Lin, Yilan County, TW;

Zhen-Cheng Wu, Hsinchu, TW;

Chi On Chui, Hsinchu, TW;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H10D 62/10 (2025.01); H10D 30/62 (2025.01); H10D 64/01 (2025.01); H10D 84/01 (2025.01); H10D 84/03 (2025.01);
U.S. Cl.
CPC ...
H10D 62/116 (2025.01); H10D 30/6211 (2025.01); H10D 30/6219 (2025.01); H10D 64/017 (2025.01); H10D 84/0151 (2025.01); H10D 84/038 (2025.01);
Abstract

Transistor gate isolation structures and methods of forming the same are provided. In an embodiment, a device includes: an isolation region; a first gate structure on the isolation region; a second gate structure on the isolation region; and a gate isolation structure between the first gate structure and the second gate structure in a first cross-section, an upper portion of the gate isolation structure having a first concentration of an element, a lower portion of the gate isolation structure having a second concentration of the element, the first concentration different from the second concentration, the lower portion extending continuously along a sidewall of the first gate structure, beneath the upper portion, and along a sidewall of the second gate structure.


Find Patent Forward Citations

Loading…