The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 02, 2026

Filed:

Jun. 29, 2023
Applicant:

Taiwan Semiconductor Manufacturing Company Limited, Hsinchu, TW;

Inventors:

Amram Eitan, Hsinchu, TW;

Jen-Hao Liu, Zhunan Township, TW;

Chih-Yuan Chiu, Zhudong Township, TW;

Hui-Ting Lin, Tainan, TW;

Chi-Chun Peng, Hsinchu, TW;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G06T 7/00 (2017.01); H10P 70/00 (2026.01); H10P 74/20 (2026.01); H10W 72/00 (2026.01);
U.S. Cl.
CPC ...
G06T 7/0004 (2013.01); H10P 70/30 (2026.01); H10P 74/203 (2026.01); G06T 2207/10048 (2013.01); G06T 2207/30148 (2013.01); H10W 72/07118 (2026.01); H10W 72/07183 (2026.01); H10W 72/07211 (2026.01); H10W 72/07232 (2026.01); H10W 72/07236 (2026.01);
Abstract

A bonded assembly may be formed by performing a chip plasma clean process on a semiconductor chip; generating at least one chip infrared image of a cleaned side of the semiconductor chip; measuring an average emissivity of at least one metallic region in the at least one chip infrared image; performing a subsequent processing step selected from a bonding step and an alternative processing step based on the measured average emissivity. The bonding step is performed if the measured average emissivity is less than a predetermined emissivity threshold value. The alternative processing step is performed if the measured average emissivity is greater than the predetermined emissivity threshold value. The alternative processing step may be selected from an additional clean step and an additional inspection step.


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